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Sulphur Hexafluoride (SF6)                

Technical Information


Latest Update: Jan. 2007

1. Description:

Sulfur hexafluoride is a colorless in-noxious and non-flammable gas at atmospheric temperature. With excellent electric insulating and arc-quenching capacity, sulfur hexafluoride gas has been widely used in the fields of electric, laser, medical, meteorological, freezing, fire-fighting, chemical, military, space aviation, nonferrous metallurgy and physical research etc.

2. Physical properties



Chemical formula




Molecular Weight


Sumlimation Point

- 63.8 oC

Melting Point

- 50.8 oC

Critical Temperature

45.64 oC

Critical Pressure

37.19 atm

Gas Density @ 20 oC , 1 atm

6.139 g/L

3. Typical technical data

Grade Classificastion

Qualified Technical Grade High-purity Grade

SF6 Content, %

min. 99.8 min. 99.9 min. 99.99

Air Content, %

max. 0.05 max. 0.03 max.0.003

CF4 Content, %

max. 0.05 max. 0.03 max. 0.003

Moisture Content, ppm

max. 8 max. 2 max. 1

Acid Content, ppm

( in terms of HF)

max. 0.3 max. 0.3 max. 0.3

Hydrolysable Fluoride Content, ppm

max. 1.0 max. 0.3 max. 0.3

Mineral Oil Content, ppm

max. 10 max. 3 max. 3


non- toxic

4. Applications

In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density plasma etching without generating carbon by-products. SF6 can be used for etching metal silicides (specially tungsten etchback), nitrides and oxides versus their metal substrates.In other industries, Sulfur hexafluoride is a insulating material used as a dielectric in electrical transformers. SF6 can be used as a inert blanketing agent.SF6 is a tracer gas for determining ventilation rates and air movements in buildings.

5. Packing, storage , and transportation

  • Packing: 10kg or 50kg packed in the qualified gas cylinder or packed according to the demands

  • Storage and Transportation :Use, store and transport below 45 oC. Store in cool and well-ventilated areas. Keep away from fire, heat , sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.

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